<meta http-equiv="refresh" content="0; URL=noscript.html"> METU | Course Syllabus

Course Objectives

The main objective of this course is to introduce students the basic concepts in MicroElecroMechanical System (MEMS) design and manufacturing. Taking this course, students would have an insight in manufacturing techniques of micro systems, effects of scaling down in physical systems and design principles of electrostatic, piezoelectric, piezoresistive, thermal and fluidic micro structures in micro domain.